Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494308 | Integrated roller transport pod and asynchronous conveyor | Richard H. Gould | 2002-12-17 |
| 6481558 | Integrated load port-conveyor transfer system | Richard H. Gould, Jeffrey Kerr | 2002-11-19 |
| 6468021 | Integrated intra-bay transfer, storage, and delivery system | Richard H. Gould, Michael D. Brain, David V. Adams | 2002-10-22 |
| 6435330 | In/out load port transfer mechanism | Richard H. Gould | 2002-08-20 |
| 6398032 | SMIF pod including independently supported wafer cassette | William J. Fosnight, Raymond S. Martin, Perry Peterson | 2002-06-04 |
| 6364595 | Reticle transfer system | William J. Fosnight, Joshua W. Shenk | 2002-04-02 |