Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494999 | Magnetron sputtering apparatus with an integral cooling and pressure relieving cathode | Philip G. Pitcher | 2002-12-17 |
| 6436509 | Electrically insulating sealing structure and its method of use in a semiconductor manufacturing apparatus | Richard E. Demaray, David F. Eline, Chandra Deshpandey | 2002-08-20 |
| 6402912 | Sputtering target assembly | Philip G. Pitcher | 2002-06-11 |