Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436509 | Electrically insulating sealing structure and its method of use in a semiconductor manufacturing apparatus | Manuel J. Herrera, David F. Eline, Chandra Deshpandey | 2002-08-20 |
| 6362097 | Collimated sputtering of semiconductor and other films | Chandra Deshpandey, Rajiv Pethe | 2002-03-26 |