Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494999 | Magnetron sputtering apparatus with an integral cooling and pressure relieving cathode | Manuel J. Herrera | 2002-12-17 |
| 6402912 | Sputtering target assembly | Manuel J. Herrera | 2002-06-11 |