Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482746 | Computer readable medium for controlling a method of cleaning a process chamber | Anand Vasudev, Toshio Itoh, Ramamujapuram A. Srinivas, Frederick Wu, Brian Boyle +1 more | 2002-11-19 |
| 6468136 | Tungsten CMP with improved alignment mark integrity, reduced edge residue, and reduced retainer ring notching | Robert Lum, David W. Groechel, Chiu Chan | 2002-10-22 |
| 6432479 | Method for in-situ, post deposition surface passivation of a chemical vapor deposited film | Mei Chang, Ramanujapuram A. Srinivas | 2002-08-13 |