Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468136 | Tungsten CMP with improved alignment mark integrity, reduced edge residue, and reduced retainer ring notching | David W. Groechel, Li Wu, Chiu Chan | 2002-10-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468136 | Tungsten CMP with improved alignment mark integrity, reduced edge residue, and reduced retainer ring notching | David W. Groechel, Li Wu, Chiu Chan | 2002-10-22 |