Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461483 | Method and apparatus for performing high pressure physical vapor deposition | Praburam Gopalraja, John C. Forster, Wei Wang | 2002-10-08 |
| 6345588 | Use of variable RF generator to control coil voltage distribution | — | 2002-02-12 |
| 6344419 | Pulsed-mode RF bias for sidewall coverage improvement | John C. Forster, Praburam Gopalraja, Liubo Hong | 2002-02-05 |