Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494986 | Externally excited multiple torroidal plasma source | Hiroji Hanawa, Yan Ye, Kenneth S. Collins, Kartik Ramaswamy, Tsutomu Tanaka | 2002-12-17 |
| 6468388 | Reactor chamber for an externally excited torroidal plasma source with a gas distribution plate | Hiroji Hanawa, Yan Ye, Kenneth S. Collins, Kartik Ramaswamy, Tsutomu Tanaka | 2002-10-22 |
| 6453842 | Externally excited torroidal plasma source using a gas distribution plate | Hiroji Hanawa, Yan Ye, Kenneth S. Collins, Kartik Ramaswamy, Tsutomu Tanaka | 2002-09-24 |
| 6410449 | Method of processing a workpiece using an externally excited torroidal plasma source | Hiroji Hanawa, Yan Ye, Kenneth S. Collins, Kartik Ramaswamy, Tsutomu Tanaka | 2002-06-25 |
| 6348126 | Externally excited torroidal plasma source | Hiroji Hanawa, Yan Ye, Kenneth S. Collins, Kartik Ramaswamy, Tsutomu Tanaka | 2002-02-19 |