Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451641 | Non-reducing process for deposition of polysilicon gate electrode over high-K gate dielectric material | Arvind Halliyal, Joong S. Jeon, Fred Cheung, Effiong Ibok | 2002-09-17 |
| 6355933 | Ion source and method for using same | Nicholas H. Tripsas | 2002-03-12 |