Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440622 | Method for controlling and monitoring light source intensity | Anthony J. Toprac, Curtis Warren Doss | 2002-08-27 |
| 6417912 | Method and apparatus for controlling optical-parameters in a stepper | Scott Bushman, Anthony J. Toprac, Edward C. Stewart | 2002-07-09 |
| 6405096 | Method and apparatus for run-to-run controlling of overlay registration | Anthony J. Toprac, Christopher A. Bode | 2002-06-11 |