Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495460 | Dual layer silicide formation using a titanium barrier to reduce surface roughness at silicide/junction interface | George Jonathan Kluth, Minh Van Ngo, Christy Mei-Chu Woo | 2002-12-17 |
| 6468900 | Dual layer nickel deposition using a cobalt barrier to reduce surface roughness at silicide/junction interface | George Jonathan Kluth, Minh Van Ngo, Christy Mei-Chu Woo | 2002-10-22 |
| 6432817 | Tungsten silicide barrier for nickel silicidation of a gate electrode | Christy Mei-Chu Woo, Minh Van Ngo, George Jonathan Kluth | 2002-08-13 |
| 6362095 | Nickel silicide stripping after nickel silicide formation | Christy Mei-Chu Woo, George Jonathan Kluth | 2002-03-26 |
| 6340395 | Salsa clean process | Barry Earl Dick, Shu Tsai Wang, Weiwen Ou, Lynne A. Okada, Yen-Chia Chu | 2002-01-22 |