Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6496596 | Method for detecting and categorizing defects | Steven J. Zika | 2002-12-17 |
| 6479879 | Low defect organic BARC coating in a semiconductor structure | Alexander H. Nickel | 2002-11-12 |
| 6475905 | Optimization of organic bottom anti-reflective coating (BARC) thickness for dual damascene process | Ramkumar Subramanian | 2002-11-05 |
| 6420097 | Hardmask trim process | Scott A. Bell | 2002-07-16 |
| 6410927 | Semiconductor wafer alignment method using an identification scribe | — | 2002-06-25 |
| 6411378 | Mask, structures, and method for calibration of patterned defect inspections | — | 2002-06-25 |