Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6420202 | Method for shaping thin film resonators to shape acoustic modes therein | Bradley Paul Barber, Peter Ledel Gammel, Yiu-Huen Wong | 2002-07-16 |
| 6355498 | Thin film resonators fabricated on membranes created by front side releasing | Edward Ming CHAN, Jungsang Kim, Hyongsok Soh | 2002-03-12 |