Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6400009 | Hermatic firewall for MEMS packaging in flip-chip bonded geometry | David J. Bishop, John VanAtta Gates, II | 2002-06-04 |
| 6355498 | Thin film resonators fabricated on membranes created by front side releasing | Edward Ming CHAN, Harold Alexis Huggins, Hyongsok Soh | 2002-03-12 |