Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486751 | Increased bandwidth thin film resonator having a columnar structure | Edward Chan, John Edwin Graebner | 2002-11-26 |
| 6437667 | Method of tuning thin film resonator filters by removing or adding piezoelectric material | Linus Albert Fetter, George Rittenhouse, Michael G. Zierdt | 2002-08-20 |
| 6420202 | Method for shaping thin film resonators to shape acoustic modes therein | Peter Ledel Gammel, Harold Alexis Huggins, Yiu-Huen Wong | 2002-07-16 |
| 6342134 | Method for producing piezoelectric films with rotating magnetron sputtering system | Ronald E. Miller | 2002-01-29 |
| 6339276 | Incremental tuning process for electrical resonators based on mechanical motion | Yiu-Huen Wong | 2002-01-15 |