Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5688389 | Method and apparatus for thin film coating an article | Eric W. Kurman, Debra M. Steffenhagen, Clifford L. Taylor | 1997-11-18 |
| 5651723 | Method and apparatus for cleaning substrates in preparation for deposition of thin film coatings | Eric W. Kurman, David A. Shogren, Jeffrey J. Hoffman | 1997-07-29 |
| 5620572 | Method and apparatus for thin film coating an article | Eric W. Kurman, Debra M. Steffenhagen | 1997-04-15 |