Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5651723 | Method and apparatus for cleaning substrates in preparation for deposition of thin film coatings | Erik J. Bjornard, Eric W. Kurman, Jeffrey J. Hoffman | 1997-07-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5651723 | Method and apparatus for cleaning substrates in preparation for deposition of thin film coatings | Erik J. Bjornard, Eric W. Kurman, Jeffrey J. Hoffman | 1997-07-29 |