Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5679983 | Highly purified metal material and sputtering target using the same | Takashi Ishigami, Minoru Obata, Mituo Kawai, Michio Satou, Takashi Yamanobe +2 more | 1997-10-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5679983 | Highly purified metal material and sputtering target using the same | Takashi Ishigami, Minoru Obata, Mituo Kawai, Michio Satou, Takashi Yamanobe +2 more | 1997-10-21 |