Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5679983 | Highly purified metal material and sputtering target using the same | Takashi Ishigami, Minoru Obata, Michio Satou, Takashi Yamanobe, Toshihiro Maki +2 more | 1997-10-21 |
| 5612571 | Sputtered silicide film | Michio Satou, Takasi Yamanobe, Tooru Komatu, Hiromi Shizu, Noriaki Yagi | 1997-03-18 |