YN

Yukio Naito

TL Tokyo Electron Limited: 1 patents #52 of 216Top 25%
Overall (1997): #54,086 of 185,788Top 30%
1
Patents 1997

Issued Patents 1997

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5698062 Plasma treatment apparatus and method Takao Sakamoto, Kazuhiro Tahara, Kenji Momose, Kosuke Imafuku, Shosuke Endo +2 more 1997-12-16