KT

Kazuhiro Tahara

TL Tokyo Electron Limited: 1 patents #52 of 216Top 25%
Overall (1997): #121,663 of 185,788Top 70%
1
Patents 1997

Issued Patents 1997

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5698062 Plasma treatment apparatus and method Takao Sakamoto, Kenji Momose, Kosuke Imafuku, Shosuke Endo, Yukio Naito +2 more 1997-12-16