TM

Teruomi Minami

TL Tokyo Electron Kyushu Limited: 1 patents #12 of 39Top 35%
TL Tokyo Electron Limited: 1 patents #52 of 216Top 25%
Overall (1997): #69,805 of 185,788Top 40%
1
Patents 1997

Issued Patents 1997

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5671544 Substrate drying apparatus and substrate drying method Kenji Yokomizo, Hiroshi Tanaka, Shori Mokuo 1997-09-30