Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5671544 | Substrate drying apparatus and substrate drying method | Kenji Yokomizo, Hiroshi Tanaka, Teruomi Minami | 1997-09-30 |
| 5666381 | Communication system used in semiconductor device manufacturing equipment | — | 1997-09-09 |