Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5671764 | Washing apparatus, and washing method | Shinya Murakami, Yuuji Kamikawa, Sinichiro Izumi, Noriyuki Anai, Takami Satoh +3 more | 1997-09-30 |
| 5626913 | Resist processing method and apparatus | Masaaki Murakami, Kenichi Nishioka | 1997-05-06 |