SA

Shinji Akaike

TL Tokyo Electron Limited: 1 patents #52 of 216Top 25%
TL Tokyo Electron Yamanashi Limited: 1 patents #3 of 45Top 7%
Overall (1997): #79,430 of 185,788Top 45%
1
Patents 1997

Issued Patents 1997

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5640101 Probe system and probe method Motohiro Kuji, Haruhiko Yoshioka, Shigeaki Takahashi 1997-06-17