Issued Patents 1997
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5701228 | Stage system or device | — | 1997-12-23 |
| 5698036 | Plasma processing apparatus | Yasuo Kobayashi, Naohisa Goto, Makoto Ando, Junichi Takada, Yasuhiro Horike | 1997-12-16 |
| 5685942 | Plasma processing apparatus and method | — | 1997-11-11 |
| 5683537 | Plasma processing apparatus | — | 1997-11-04 |
| 5637961 | Concentric rings with different RF energies applied thereto | Kibatsu Shinohara | 1997-06-10 |