KS

Kibatsu Shinohara

TL Tokyo Electron Limited: 1 patents #52 of 216Top 25%
Overall (1997): #117,826 of 185,788Top 65%
1
Patents 1997

Issued Patents 1997

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5637961 Concentric rings with different RF energies applied thereto Nobuo Ishii 1997-06-10