KA

Kiyotaka Akiyama

TL Tokyo Electron Limited: 1 patents #52 of 216Top 25%
TL Tokyo Electron Yamanashi Limited: 1 patents #3 of 45Top 7%
📍 Kofu, JP: #8 of 25 inventorsTop 35%
Overall (1997): #118,395 of 185,788Top 65%
1
Patents 1997

Issued Patents 1997

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5636960 Apparatus for detecting and aligning a substrate Tutomu Hiroki, Shoichi Abe, Tsutomu Satoyoshi 1997-06-10