SA

Shoichi Abe

TL Tokyo Electron Limited: 1 patents #52 of 216Top 25%
TL Tokyo Electron Yamanashi Limited: 1 patents #3 of 45Top 7%
Overall (1997): #79,451 of 185,788Top 45%
1
Patents 1997

Issued Patents 1997

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5636960 Apparatus for detecting and aligning a substrate Tutomu Hiroki, Kiyotaka Akiyama, Tsutomu Satoyoshi 1997-06-10