Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5665640 | Method for producing titanium-containing thin films by low temperature plasma-enhanced chemical vapor deposition using a rotating susceptor reactor | Robert F. Foster, Rene E. LeBlanc | 1997-09-09 |
| 5628829 | Method and apparatus for low temperature deposition of CVD and PECVD films | Robert F. Foster, Rikhit Arora | 1997-05-13 |
| 5610106 | Plasma enhanced chemical vapor deposition of titanium nitride using ammonia | Robert F. Foster, Rikhit Arora | 1997-03-11 |
| 5593511 | Method of nitridization of titanium thin films | Robert F. Foster | 1997-01-14 |