Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5628829 | Method and apparatus for low temperature deposition of CVD and PECVD films | Robert F. Foster, Joseph T. Hillman | 1997-05-13 |
| 5610106 | Plasma enhanced chemical vapor deposition of titanium nitride using ammonia | Robert F. Foster, Joseph T. Hillman | 1997-03-11 |