Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5653838 | Glass heating and sealing system | Ming-Jang Hwang, Chi-Cheong Shen, Robert T. Matthews, Phillip Chapados, Jr. | 1997-08-05 |
| 5591493 | Structure and method for incorporating an inductively coupled plasma source in a plasma processing chamber | Ajit Paranjpe, Robert T. Matthews | 1997-01-07 |