Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5634237 | Self-guided, self-propelled, convertible cleaning apparatus | — | 1997-06-03 |
| 5601366 | Method for temperature measurement in rapid thermal process systems | — | 1997-02-11 |
| 5593924 | Use of a capping layer to attain low titanium-silicide sheet resistance and uniform silicide thickness for sub-micron silicon and polysilicon lines | Pushkar Apte | 1997-01-14 |
| 5591493 | Structure and method for incorporating an inductively coupled plasma source in a plasma processing chamber | Cecil J. Davis, Robert T. Matthews | 1997-01-07 |