Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5671119 | Process for cleaning an electrostatic chuck of a plasma etching apparatus | Yuan-Chang Huang | 1997-09-23 |
SY
Shzh-Kuei Yen
Overall (1997): #77,039 of 185,788Top 45%
1
Patents 1997