Issued Patents 1997
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5702972 | Method of fabricating MOSFET devices | Chaochieh Tsai, Shaulin Shue | 1997-12-30 |
| 5691212 | MOS device structure and integration method | Chaochieh Tsai | 1997-11-25 |
| 5668024 | CMOS device structure with reduced risk of salicide bridging and reduced resistance via use of a ultra shallow, junction extension, ion implantation process | Chaochieh Tsai | 1997-09-16 |
| 5641710 | Post tungsten etch back anneal, to improve aluminum step coverage | Jyh-Haur Wang | 1997-06-24 |
| 5597442 | Chemical/mechanical planarization (CMP) endpoint method using measurement of polishing pad temperature | Hsi-Chieh Chen | 1997-01-28 |