Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5641710 | Post tungsten etch back anneal, to improve aluminum step coverage | Shun-Liang Hsu | 1997-06-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5641710 | Post tungsten etch back anneal, to improve aluminum step coverage | Shun-Liang Hsu | 1997-06-24 |