Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5694207 | Etch rate monitoring by optical emission spectroscopy | Hun-Jan Tao | 1997-12-02 |
SH
Shu-Chi Hung
Overall (1997): #78,874 of 185,788Top 45%
1
Patents 1997