Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5694207 | Etch rate monitoring by optical emission spectroscopy | Shu-Chi Hung | 1997-12-02 |
HT
Hun-Jan Tao
Overall (1997): #138,965 of 185,788Top 75%
1
Patents 1997