Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5604134 | Particle monitoring method for plasma reactors with moving gas distribution housings | Kuan-Hui Chang, Tzu-Min Peng, Po-Tao Chu | 1997-02-18 |
SY
Shin-Kuei Yen
Overall (1997): #77,038 of 185,788Top 45%
1
Patents 1997