Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5672543 | Volcano defect-free tungsten plug | Chaur Rong Chang, Tzu-Min Peng, Kuang-Hui Chang | 1997-09-30 |
| 5604134 | Particle monitoring method for plasma reactors with moving gas distribution housings | Kuan-Hui Chang, Tzu-Min Peng, Shin-Kuei Yen | 1997-02-18 |