Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5611864 | Microwave plasma processing apparatus and processing method using the same | Tadashi Kimura, Yoshikazu Yoshida, Yasunao Okazaki | 1997-03-18 |
SM
Shinichi Mizuguchi
Overall (1997): #78,170 of 185,788Top 45%
1
Patents 1997