Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5611864 | Microwave plasma processing apparatus and processing method using the same | Yoshikazu Yoshida, Shinichi Mizuguchi, Yasunao Okazaki | 1997-03-18 |
| 5604378 | Semiconductor device, its lead frame, and heat spreader having through holes | Takaya Yusa | 1997-02-18 |