MS

Misuo Sugiyama

SC Speedfam Co.: 1 patents #2 of 9Top 25%
📍 Hadano, JP: #26 of 91 inventorsTop 30%
Overall (1997): #101,688 of 185,788Top 55%
1
Patents 1997

Issued Patents 1997

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5605499 Flattening method and flattening apparatus of a semiconductor device Hatsuyuki Arai 1997-02-25