Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5685766 | Polishing control method | Wayne Mattingly | 1997-11-11 |
| 5605499 | Flattening method and flattening apparatus of a semiconductor device | Misuo Sugiyama | 1997-02-25 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5685766 | Polishing control method | Wayne Mattingly | 1997-11-11 |
| 5605499 | Flattening method and flattening apparatus of a semiconductor device | Misuo Sugiyama | 1997-02-25 |