Issued Patents 1997
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5698352 | Semiconductor device containing Si, O and N anti-reflective layer | Tetsuo Gocho | 1997-12-16 |
| 5689513 | Data transmission system having a backup testing facility | Ryoji Okita, Michiko Kawada | 1997-11-18 |
| 5677111 | Process for production of micropattern utilizing antireflection film | — | 1997-10-14 |
| 5670297 | Process for the formation of a metal pattern | Hiroyuki Nakano | 1997-09-23 |
| 5648202 | Method of forming a photoresist pattern using an anti-reflective | Tetsuo Gocho | 1997-07-15 |
| 5641607 | Anti-reflective layer used to form a semiconductor device | Tetsuo Gocho | 1997-06-24 |
| 5627625 | Pattern projecting method | — | 1997-05-06 |
| 5591566 | Method of forming a resist pattern by using a silicon carbide anti-reflective layer | — | 1997-01-07 |