Issued Patents 1997
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5700349 | Method for forming multi-layer interconnections | Masanori Tsukamoto | 1997-12-23 |
| 5698352 | Semiconductor device containing Si, O and N anti-reflective layer | Tohru Ogawa | 1997-12-16 |
| 5648202 | Method of forming a photoresist pattern using an anti-reflective | Tohru Ogawa | 1997-07-15 |
| 5641607 | Anti-reflective layer used to form a semiconductor device | Tohru Ogawa | 1997-06-24 |
| 5632910 | Multilayer resist pattern forming method | Tetsuji Nagayama | 1997-05-27 |
| 5600165 | Semiconductor device with antireflection film | Masanori Tsukamoto | 1997-02-04 |