Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5591302 | Process for etching copper containing metallic film and for forming copper containing metallic wiring | Junichi Sato, Yukihiro Kamide, Toshiharu Yanagida | 1997-01-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5591302 | Process for etching copper containing metallic film and for forming copper containing metallic wiring | Junichi Sato, Yukihiro Kamide, Toshiharu Yanagida | 1997-01-07 |