Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5688364 | Chemical-mechanical polishing method and apparatus using ultrasound applied to the carrier and platen | — | 1997-11-18 |
| 5685950 | Dry etching method | — | 1997-11-11 |
| 5628954 | Process for detecting fine particles | — | 1997-05-13 |
| 5591302 | Process for etching copper containing metallic film and for forming copper containing metallic wiring | Keiji Shinohara, Yukihiro Kamide, Toshiharu Yanagida | 1997-01-07 |