Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5700379 | Method for drying micromechanical components | — | 1997-12-23 |
| 5700702 | Method for manufacturing an acceleration sensor | Helmut Klose, Thomas Scheiter, Christofer Hierold | 1997-12-23 |