Issued Patents 1997
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5700702 | Method for manufacturing an acceleration sensor | Helmut Klose, Markus Biebl, Thomas Scheiter | 1997-12-23 |
| 5662772 | Method for the selective removal of silicon dioxide | Thomas Scheiter, Ulrich Naeher | 1997-09-02 |
| 5663574 | Power semiconductor component with monolithically integrated sensor arrangement as well as manufacture and employment thereof | Herbert Schwarzbauer | 1997-09-02 |
| 5631428 | Capacitive semiconductor pressure sensor | Ralf Catanescu, Thomas Scheiter | 1997-05-20 |
| 5596219 | Thermal sensor/actuator in semiconductor material | — | 1997-01-21 |